Scanning Transmission Electron Microscopes (STEM)

Scanning transmission electron microscopes (STEM) combine the functionality of transmission electron microscopy (TEM) and scanning electron microscopy (SEM). Like TEM, STEM analyzes a beam of electrons transmitted by very thin sample. Like SEM, the STEM process scans a focused beam of electrons across the sample in a rectangular pattern.

Interactions between the electrons and the sample produce a signal, which is used to create a virtual image.

STEM involves the analysis of other signals that can't be spatially correlated in TEM, such as scattered beam electrons, distinctive X-rays, and electron energy loss. STEM also has a much better spatial resolution than SEM.