ZYGO, a leader in technology and application support in heterodyne displacement interferometry, provides complete solutions and support for OEM metrology application with its ZMI™ Series Displacement Measuring Interferometers. The company’s OEM products and technologies have been field proven for a number of years of use in leading-edge production facilities.
Key Features
The key features of the ZMI™ series are as follows:
- Heterodyne displacement interferometry
- A single laser source capable of supporting multiple axes
- Easy to align, highly stable, and insensitive to signal amplitude changes
- High signal to noise phase measurements enable high precision and remove false counts, even at zero slew rates
- Highly robust for OEM applications
Typical Applications
The typical applications of the ZMI™ series are as follows:
- Calibration: Measurement and calibration of high frequency or high resolution mechanical motions
- Lithography tools: e-beam and laser mask writers, optical steppers and scanners
- Process equipment: probers, memory repair tools, drilling tools, and die bonders
- Metrology tools: Wafer, mask, and LCD measurement and inspection tools, and CD-SEMs
Configure the system to suit specific needs:
ZYGO offers a variety of
- Laser heads
- Interferometers and optics
- Measurement electronics
- Cables and feedthroughs
This modular approach enables the user to configure a system that ideally suits their requirements by selecting the most appropriate components.