Mar 22 2004
The SEZ Group, the market leader and premier innovator in single-wafer wet-processing technology for the semiconductor industry, today announced it has received a follow-on order from one of the world's leading pure-play wafer foundries, DongbuAnam Semiconductor (Seoul, South Korea). The order is for several of SEZ's 223 single-wafer Spin Processors amounting to over US $10 million.
Slated for installation at DongbuAnam's Sangwoo, South Korea fab in the second and third quarters of 2004, these tools will be deployed for backside cleaning and polymer/film removal in the manufacture of CMOS devices with 0.18- and 0.13-micron design rules.
With shrinking device geometries and the utilization of new materials, such as copper, foundries and chipmakers, alike, cannot afford the costly risk of cross contamination during critical cleans and subsequent yield loss.
A robot on a linear tracking system transports 200-mm wafers from four cassettes to two identical process chambers with the capability of applying up to three chemicals each. One chemical cabinet for each chemical supplies both chambers. The 223 also features an object-oriented software architecture (Windows NT platform), along with an International SEMATECH-compliant graphical user interface (GUI) and touch screen, to allow for simplified equipment operation. Other key benefits of SEZ's spin-processing technology include excellent uniformity, high selectivity, strong process repeatability and flexibility.
For more information on semiconductors