Applied Materials Receives Order From Semiconductor Industry

Applied Materials, Inc. has received an order from Chartered Semiconductor Manufacturing, one of the world's top three dedicated semiconductor foundries, for a broad range of transistor, low k interconnect and inspection systems. These Applied Materials systems will be used to manufacture 130nm and 90nm devices at Chartered's first 300mm facility, Fab 7, in Singapore.

Chartered's order included multiple CMP (Chemical Mechanical Polishing), PVD (physical vapor deposition), dielectric and tungsten CVD (chemical vapor deposition) systems, and transistor fabrication technologies such as RTP and DPN (decoupled plasma nitridation) systems, as well as wafer inspection, CD-SEM (critical dimension scanning electron microscope) metrology and defect analysis systems. All of the systems are capable of processing the most advanced copper/low k devices to the 90nm technology node and beyond.

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