Oxford Instruments Plasma Technology (OIPT) has just received a 3 system order from the prestigious new Melbourne Centre for Nanofabrication (MCN) in Australia. The systems, two Plasmalab® System100 ICP380 tools and a Plasmalab System100 PECVD system, have been bought as part of the Centre’s programme to equip their cleanrooms with state of the art instrumentation for nano and micro scale fabrication.
Plasmalab System100 PECVD
Oxford Instruments has a reputation for working with and equipping many renowned universities and research institutes throughout Europe and USA. That fact and the flexibility of OIPT’s tools were important criteria in MCN’s decision to choose OIPT as a strategic partner. The MCN is the Victorian node of the Australian National Fabrication Facility (ANFF), a collaborative initiative between the Australian federal government, the Victorian state government, CSIRO and major Victorian Universities MCN chose Oxford Instruments as the key provider for their etch, deposition and growth tools as OIPT offer proven, flexible and reliable tools, coupled with excellent global service and support. MCN’s ultimate purpose is to fill the gap in Australia for open access, multi-scale fabrication infrastructure, spanning a range of fabrication environments and materials.