A technical workshop on the fundamentals of plasma dry etching process has been hosted by Plasma-Therm, a supplier of advanced plasma process equipment, and the University of California, Berkeley’s Marvell Nanofabrication Laboratory.
Plasma processing is an important technology for the electronics industry to define patterns via etching. The process also has potential applications in various technologies and sciences.
The workshop includes presentations on the plasma etching technology, understanding etching methods and plasma reactor systems. In addition, sessions have been conducted on innovative etch processes for metals, dielectric materials, III-V compound semiconductors and deep silicon. The event attendees have been from various disciplines, including biosciences, materials, physics and chemistry. The workshop has provided a platform for the attendees to learn about the application of the plasma etching technology to fabricate nanoscale, medical, photonic and electronic devices. Professionals, professors, engineering staff and students in the semiconductor industry attended the workshop.
Dr. David Lishan, Plasma-Therm principal scientist, noted that the company’s commitment to its customers extends beyond offering technologies and services and they are able to make contribution to the education of emerging researchers. The Marvell Nanofabrication Laboratory offers critical R&D facilities for the local industry and academic circles. Dr. Bill Flounders, Executive Director of the UC Berkeley’s lab, remarked that the workshop is more valuable and it helps to advance research at their facility.