SUSS MicroTec, a global supplier of equipment and process solutions for the semiconductor industry and related markets, has recently received an order for its ACS300 coater/developer tool from SPIL.
Established in May 1984, Siliconware Precision Industries Co., Ltd. has become one of the leading providers of comprehensive semiconductor assembly and test services. SPIL posted annual sales of US$ 2.5 billion in 2013 and currently employs around 22,000 people worldwide.
The ACS300 is a modular cluster system designed to meet manufacturers' needs for clean, reliable and high throughput photolithography applications. The tool will be equipped with new features especially developed for advanced packaging applications. SPIL can use the new coater/developer system for 200mm and 300mm wafers, with a short change-over time.
“Our solutions offer customers a very competitive cost-of-ownership for standard processes and at the same time allow them to move beyond standard processes and applications to drive the technological development in the semiconductor industry further.” says Gary Choquette, General Manager Coater/Developer of SUSS MicroTec.
The SUSS MicroTec Group is a leading supplier of equipment and process solutions for microstructuring applications with more than sixty years of engineering experience.
The solution portfolio covers all performance relevant steps for wafer processing ranging from coating, baking, developing, aligning to wafer bonding as well as photomask cleaning equipment. It is complemented by specialized add-ons such as nanoimprint lithography tools and optical lenses.
The production of memory chips, cameras for mobile phones or tire pressure sensors – the equipment solutions of SUSS MicroTec are applied within a wide variety of manufacturing processes for applications of daily or industrial use. Customers in the semiconductor industry and related markets like MEMS and LED appreciate our comprehensive experience in wafer processing. This makes us a valuable partner for high-volume production as well as for research and development.