Jul 19 2007
Today at SEMICON West, Entegris, Inc. introduced the NT® 8800 Conductivity Sensor, a high-purity flow-through conductivity sensor that allows semiconductor manufacturers to accurately measure and repeatedly produce reliable chemical blends. The NT 8800 is ideally suited for processes that require completely non-metallic wetted material, such as measuring and monitoring the concentration of HF blends from concentrated to ultra-high dilution. Leveraging the already proven high performance and reliability of the Entegris family of NT flow controllers and sensing equipment, the NT 8800 also will help manufacturers lower their cost of ownership by allowing more effective chemical control.
"Repeatable and accurate chemical blends translate into increased yields, optimized chemical consumption and fewer wafer defects during wet etch, CMP delivery and on-demand chemical blending applications," said Todd Edlund, general manager and vice president of the Entegris Liquid Systems business. "The NT 8800 Conductivity Sensor allows Entegris customers to optimize their chemical consumption, ensure process integrity in their applications and significantly increase their yields."
The NT 8800 wetted flowpath is made of 100 percent perfluoroalkoxy polymer resin and is compatible with aggressive chemistries up to 140ºC. It features Entegris' PureBond® welding technology, which eliminates the need for O-rings or gaskets. Contact your regional customer service center for ordering information.