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Entegris Showcases Wafer and Reticle Protection Technology at SEMICON

Entegris, Inc. showcases its industry- leading wafer and reticle protection technology today at SEMICON West, including the industry's lightest and most compact 300 mm Multiple Film Frame Shipper (MFFS). The Entegris 300 mm MFFS provides manufacturers increased safety and security while shipping fully processed wafers or singulated die mounted to film frame rings.

The shipper is an economical alternative to cumbersome, heavy cassettes and is ideal for high-volume shipping between back-end assembly operations. Building on the success of the existing line of Entegris Ultrapak® wafer shipping boxes, the MFFS design prevents film frame movement and reduces particle generation. The new shipper is stackable with both Entegris 300 mm and 200 mm film frame shippers and can accommodate 13 wafers, making it economical for storage and shipping applications. It is available in ESD safe materials, is reusable and also has the flexibility to accommodate either metal frames or Entegris plastic frames.

"The increasing complexity of smaller, more sensitive devices drives manufacturers to seek more reliable methods for storing and shipping wafers during the test, assembly and packaging process," said Jean-Marc Pandraud, chief operating officer for Entegris. "The Entegris 300 mm MFFS allows high-volume device manufacturers to achieve maximum wafer protection, greater yield in the test, assembly and packaging process, and lower cost of ownership."

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