Okyay Tech’s Atomry Thermal ALD/ALE can be customized to fit any laboratory or situation.
Image Credit: OkyayTech
Specifications
- Reactor chamber made of stainless steel
- MKS MFC-controlled carrier gas
- 250 ºC substrate heating (320 ºC optional)
- Varying substrate sizes: 100 mm, 200 mm, and 300 mm
- MKS pneumatic isolation valve
- Swagelok high-speed ALD valves (4–8 ports)
- Convection improved Pirani vacuum gauge
- World-class scientific support team and recipe library
- Completely automated with recipe control
- User-friendly graphical user interface
Customizations
- Powder ALD kit with rotating canister, conformal coating of granular substrates
- Glovebox integration
- Ozone (O3) process kit, completely recipe-integrated and computer regulated
- Precursor cooling
- Low Vapor Pressure Chemical Delivery Upgrade
- In-situ QCM thickness monitor
- In-situ ellipsometer metrology upgrade
- Dome-lid for 3D objects and non-standard substrates
- Customized vacuum ports for in-situ RGA and IR spectroscopy
Gradian Powder ALD
3D Conformal Coatings
Gradian is a laboratory-scale ALD tool that works with powder substrates. Gradian coats free-flowing granular samples uniformly and conformally. Powder batches of 1 g to 10 g are typical for the research-scale efforts.
Image Credit: Okyaytech Ald