Jul 8 2004
Celerity Group, Inc. today announced the introduction of the ConSensor™ Concentration Management System. Embedded with Celerity’s Spectrym™ technology, it is designed to provide a reliable, cost effective means for monitoring and controlling the concentrations of oxidizers in CMP slurry blends. This new product features a number of benefits that are designed to enhance performance and reduce costs.
The ConSensor™ monitors and maintains key chemical ingredients, vital to a process function, by using optical measuring techniques and proprietary algorithms that are based on Celerity’s Spectrym™ technology. The system automatically qualifies blends, ensures consistent batch-to-batch reproducibility, and maintains consistent day tank contents. The ConSensor™ is most beneficial in Copper and Tungsten CMP processes by measuring ranges between 1-8% by weight and maintaining the setpoint at better than ± 0.05% weight.
ConSensor™ is an in-line device that requires no reagents for chemical endpoint detection and reduces waste to minute slurry volumes and DI water. Its modular, no moving part design and in-line metrology contributes to ease of maintenance.
“To meet the demands required for next generation production, environments demand speed, consistency and precision. The ConSensor™ is one of the many improvements that we believe will help shape tomorrow’s fab operation” said Jeff Wilmer, Senior Director of Technology at Celerity.
For more information on copper, click here.