Co-authored by Dr Sebastien Pochon, and Dr Dave Pearson, Senior Research Scientists at Oxford Instruments Plasma Technology (OIPT), the paper presents a review of ion beam processes.
The paper discusses the main applications and advantages of using Ion Beam technology for deposition processes when compared to plasma or evaporation (PVD). It also gives an overview of how an ion beam is generated, followed by a presentation and discussion of some advantageous applications of ion beam processes.
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As part of our ongoing commitment to research & development, and innovation, OIPT has produced a series of White Papers that can all be found on our webpages, and that are written by our team of scientists and procees engineers.