Oct 23 2013
Axcelis Technologies, Inc., a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced that it has received a multiple system order for the Company's new Purion XE single wafer, high energy implanter.
The systems will be installed at the customer's new fab in the Asia Pacific Region, and will be used in high volume production of advanced NAND devices. The systems will ship in Q4. Axcelis expects to receive additional follow-on orders as manufacturing capacity at the new fab expands.
John Aldeborgh, executive vice president, customer operations, said, "We are pleased to expand our installed base with this industry leader and look forward to collaborating closely with them as they ramp their manufacturing capacity. The Purion XE is the industry's most advanced high energy system available today, and provides customers with unique, compelling solutions to meet the demands of high volume, next generation device manufacturing."
The Purion XE
The Purion XE is the industry's most advanced high energy implanter. The system leverages the Purion platform to deliver absolute beam purity and the most precise dopant placement possible, while ensuring the highest levels of productivity and capital efficiency. The Axcelis single wafer LINAC technology is the industry benchmark for high energy productivity and lowest cost of ownership, while providing customers remarkable manufacturing flexibility with true medium current capability. Each member of the Purion family shares a common, powerful 500+ wafers per hour end station, industry leading source technology and an innovative and precise ultra-pure beam line.
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at axcelis.com.