Jun 17 2015
The wafer production for the semiconductor industry is a serious business. Therefore EVT has now with the EyeVision software, developed a program for particle inspection.
Particle inspection on wafer
Particles are probably the best known defects when it comes to the wafer production. During transport, during processing or even in the plant itself, particles such as e.g. dust or material abrasion, can settle on the wafer. This can develop into an undesirable covering.
Therefore the processing in this area is affected. The particles can prevent the etching or the precipitation of layers. This can lead to malfunctioning such as e.g. short-circuits or missing electrical joints between conductors.
The particle inspector of EVT analyzes the surface of the wafer concerning dust and other particles. The measuring principle is based on a laser line.
The laser line scans the wafer. The wafer is reflecting scattered light. And this scattered light can with the help of photodiodes be changed into an electrical signal. This signal is then compared with a previously saved reference value.
The EyeVision software recognizes even the slightest discrepancy and therefore can send an evaluation of the wafer as Good or Bad.
The EyeVision software is also very easy-to-handle and the particle inspection can be adjusted easily in the graphical user interface.