May 7 2007
Air Products, through its subsidiary of Air Products San Fu, has recently expanded nitrous oxide (N20) capacity at its Nanke plant in Taiwan to support the fast growing semiconductor and thin film transistor-liquid crystal display (TFT-LCD) markets in Asia. The new capacity, which has been on-stream since the beginning of this year, doubles the N2O capacity and produces high purity N2O products to meet existing and potential customers’ requirements.
The expanded capacity will continue to use the exact technology as the existing production capabilities. There will be no change in raw material supply for production, and Air Products will continue to maintain its strict online monitoring of the operational process and the thorough analysis of the finished goods produced at Nanke.
“This expansion reinforces our commitment to our customers and to maintaining our position as the leading world supplier of electronics specialty gases. We will leverage our global capabilities and product portfolio to be the most reliable supplier to the industry,” said Corning Painter, vice president, Global Electronics Division for Air Products.
Nitrous oxide is used with silane for chemical vapor deposition of silicon nitride layers, which are typically used as a passivation, masking, or insulating layers. Another of its main applications is in the plasma deposition of Fluorinated Silica Glass (FSG) as a low-k dielectric insulating film between adjacent metal lines.