The Regulus8230 from Hitachi is an ultra-high resolution cold-field emission SEM that has been improved for sensitive and nanostructure materials.
Image the Most Challenging Specimens
- Sub-nanometer resolution even below 1 kV available
- Latest multi-detection system such as energy filtering
- High contrast imaging at ultra-low dose available with the immersion lens detection system
- Comprehend internal sample data with angular adjustable HAADF, ADF and BF
Image Credit: Hitachi High-Tech Europe
Advanced Nanoanalysis
- Optimized for annular or windowless EDS detectors, providing superior light element analysis
- Superfast, high sensitivity EDS can be achieved with the help of annular detectors with a solid angle of greater than 1 sr
Image Credit: Hitachi High-Tech Europe
Rapid Sample Handling
- Quick sample exchange provided via load lock for up to 200 mm diameter samples
- Users can easily navigate on their sample or holder to determine the proper region of interest with the help of acquired SEM images or color optical image
Powerful Automation Tools
- Volume microscopy with the help of automated array tomography
- Automate complicated or repetitive procedures with most sophisticated scripting
- Precise, calibrated dimension measurements with the help of CD-SEM algorithms
- Users can automatically image huge sample areas over multiple fields of view
Future Proof
- Load encapsulated oxidation sensitive specimens (such as Lithium battery components) under inert-gas or vacuum settings
- Image hydrated or sensitive samples using Hitachi’s patented Ionic Liquid or a cryo stage
- CL can be added for more data from pharmaceuticals, photonics, or minerals