SEM-Base® VI is the next generation in STACIS active piezoelectric vibration cancellation.
SEM-Base VI can support many Focused Ion Beam (FIB) and Small Dual Beam instruments, as well as all commercial Scanning Electron Microscopes (SEMs).
SEM-Base VI offers enhanced vibration isolation performance, a faster, more robust controller, and an advanced graphical user interface (GUI). SEM-Base VI will enable more labs and facilities to achieve the level of floor vibration required to satisfy the tool manufacturer's specifications.
SEM-Base VI employs a unique “serial architecture” where the vibration sensors quantify floor vibration, not payload vibration. This guarantees that contrary to other designs, payload resonances do not integrally restrict vibration isolation or result in instability.
For maximum sensitivity in the hard-to-measure sub-Hz range, the vibration sensors are low-frequency inertial velocity sensors. Integrated with the unique piezo-actuator technology, SEM-Base VI attains very high levels of vibration cancellation, even on already quiet floors.
On average, SEM-Base VI offers 6 dB more vibration isolation compared to the earlier models. In addition, the DC-2020, which is TMC’s next-generation controller, characterizes a new dual-core processor and offers tool owners and scientists a very practical and user-friendly graphical interface for operational peace of mind and quick system assessment.
When connecting over Ethernet, the DC-2020 creates the SEM-Base GUI in the user's browser without having to install any additional software or application programs. Alternatively, the user can interface with the controller via an onboard menu-driven Liquid Crystal Display (LCD).
The SEM-Base VI Advantage
- Active Inertial Vibration Cancellation – SEM-Base VI employs high-sensitivity, low-frequency inertial velocity sensors to attain high levels of vibration attenuation, even on quiet floors.
- Hard-Mount Technology – SEM-Base VI is compatible with all internal SEM vibration control systems and aggressively mitigates low-frequency floor vibration starting at 0.6 Hz.
- Serial Design with Piezoelectric Technology – The unique serial design and proprietary high-force piezoelectric technology results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, inertial active vibration cancellation with 90% reduction starting at 2 Hz.
Specifications
Performance Specifications. Source: TMC Vibration Control
| . |
. |
| Active degrees of freedom |
6 |
| Active bandwidth |
0.6 Hz - 100 Hz |
| Passive natural frequency |
12 Hz nominal |
| Effective active resonant frequency |
0.5 Hz |
| Isolation at 1 Hz |
40% - 70% |
| Isolation at 2 Hz |
90% |
| Isolation at ≥3 Hz |
90-98% |
| Internal noise |
<0.1 nm RMS |
| Operating load range |
Standard capacity: 900 - 2,500 lbs (408 - 1134 kg)
High capacity: 2,500 - 3,200 lbs (1134 - 1452 kg) |
Magnetic field emitted at maximum
4 in.(102 mm) from the platform |
<0.02 μG broadband RMS |
Design, Dimensions, and Environmental and Utility Requirements. Source: TMC Vibration Control
| . |
. |
| Environmental and safety |
CE and RoHS compliant |
| Active isolation elements |
Piezoelectric actuators with minimum 3300 lb. (1500 kg) capacity receive signal from a high-voltage amplifier with an output of up to 800 VDC. Vertical actuators support the isolated payload. |
| Passive isolation element |
single stiff elastomer (no compressed air supply required) |
| Vibration sensor elements |
downward facing geophone type inertial sensors
that measure floor vibration below the isolator
and deliver voltage proportional to the velocity of vibration motion |
| Active feedback control loop |
Floor vibration is measured, processed
and attenuated below the spring
supporting the isolated surface |
| Dimensions (WxD) |
35.25 x 44.25 in.
895 x 1124 mm |
| Height |
6.3 in. (160 mm) nominal,
doesn't change when SEM-Base is switched off |
| Operating temperature |
50° - 90° F
10° - 32° C |
| Storage temperature |
-40° - 130° F
-40° - 55° C |
| Humidity |
< 80% @ 68° F | 20° C, Maximum dewpoint 18 degrees C |
| System power requirements |
100, 120, 230, 240 VAC
50/60 Hz AC; <600 W
CE compliant |
| Floor displacement |
<800 μin. (20 μm) below 10 Hz |
Built-in Controller Specifications. Source: TMC Vibration Control
| . |
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| Processor |
150/75 MHz dual core |
| Sampling rate |
10 kHz |
| Analog outputs |
16 channels |
| Analog inputs |
16 channels |
| Status light |
single LED |
| Front panel ports |
1x serial USB 2.0
1x serial Micro-USB
1x Ethernet RJ-45
2x BNC |
| User interface |
Front panel LCD display
Character menu on HyperTerminal
Extended GUI for Microsoft Windows
Embedded Ethernet GUI |
Image Credit: TMC Vibration Control
Performance
1800 lbs (818 kg) payload tested with simulated vibration at VC-C (500 μin./s, 12.5 μm/s RMS). Image Credit: TMC Vibration Control
Application Photos
Image Credit: TMC Vibration Control
Image Credit: TMC Vibration Control
Image Credit: TMC Vibration Control
Image Credit: TMC Vibration Control
Image Credit: TMC Vibration Control
Image Credit: TMC Vibration Control
Image Credit: TMC Vibration Control