The S lynx 2 is a compact and versatile 3D optical system for roughness, volume, and critical dimensions measurements.
Image Credit: Sensofar Metrology
The S Lynx 2’s purpose is to collect and analyze data with extraordinary speed. It assures maximum data collection by employing three separate measurement techniques: interferometry, confocal, and AI focus Variation, each quicker than the last. Utilize the PC’s full potential for data processing by performing acquisition computations in the sensor head.
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Streamlined Flexibility
Large Extended Measurements
With the help of the sophisticated stitching features, users can record high-resolution images across a wider region. The novel algorithms span the whole motorized stage range, which is remarkable given the small size of the device at 125 × 75 mm.
Image Credit: Sensofar Metrology
Use the Best Acquisition Technology
Three extremely potent measurement methods—Ai Focus Variation, Confocal, and Interferometry—are included with the S Lynx 2. This dynamic trio ensures unmatched measurement accuracy by enabling data gathering over a broad range of materials using the best technology for each surface.
Ai Focus Variation. Image Credit: Sensofar Metrology
Confocal. Image Credit: Sensofar Metrology
Interferometry. Image Credit: Sensofar Metrology
Throughput is crucial. This system is made to measure data at blazing speeds using all available measuring technologies. The sensor head performs the acquisition computations, freeing up the PC's entire processing capacity for data analysis.
Fast Scan, Fast Analysis
It is crucial to have throughput. This system is made to measure at blazing speeds using all available measuring technologies. The sensor head carries out the acquisition calculations, freeing up the PC’s whole processing capacity for the data analysis.
Image Credit: Sensofar Metrology
The Most Practical Approach
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Find out how effortlessly the bench-top system combines classic and modern components, combining manual and motorized parts for superior practicality.
Easy Focusing Across Variable Sizes
Fit and focus on samples with ease, thanks to an adjustable column that allows for up to 100 mm of movement. With the motorized Z stage’s 20 mm travel range, users can achieve accuracy and focused concentration on the tiniest samples.
Extended Lifetime
Due to the S Lynx 2’s use of LED light sources and lack of moving parts for imaging, it runs smoothly and does not need frequent replacements, rigorous calibration, or ongoing maintenance.
Simplified Sample Positioning
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With a motorized XY stage that has a travel range of 125 mm × 75 mm, users can place and maneuver the samples with ease. A tip-tilt stage that is precisely aligned to the optical axis makes it simple to level the samples.
Expanded Imaging Capabilities
Image Credit: Sensofar Metrology
During operation, a 6-position motorized nosepiece allows users to switch between objective lenses at any point. Choose from a variety of suitable lenses, some of which include water immersion and extremely long working distances.
Compact Dimensions
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Users can place the system anywhere on the manufacturing floor or in a laboratory, thanks to its modest size and compact design.
Adaptable To the Needs
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With the S Lynx 2, enjoy a hassle-free setup. Since there are no more parts under the table, users can locate it with ease. It only takes two cables to connect the profiler and PC to get it operating.
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Sensoview
Broadening Analysis Horizons
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SensoVIEW is the best analysis program for a variety of applications. It has an entire toolbox for preparing and getting data out of datasets that are 2D and 3D.
Surface Characterization
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SensoVIEW offers committed operators an easy-to-use interface with step-by-step instructions for extracting surface texture and flatness characteristics while adhering to relevant ISO standards, volume calculations, and other features.
Dimensional Measurements
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For contour and profile views, there are several tools for essential dimensions. Every one of them has the capacity to include tolerances and has an auto-adjustment feature that guarantees a comprehensive dimensional examination.
SensoPRO Rapid Quality Control
- Automatic recognition of the features of interest
- Analysis of a massive datasets (>100 files)
- 1-second processing time per file
- Configurable processing settings and parameters
- Command line available for external SensoPRO integration
- Pass/Fail reports based on predefined tolerances
Analysis Templates
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Templates can be constructed from any performed analysis, saving all procedures used, including data modifiers, surface texture operators, important dimensions, and reporting settings.
In Need of a Custom Solution?
Sensofar-Tech is able to create and modify any analytical solution needed for the given situation.
Plugin-Based Solutions
SensoPRO offers a large plugin library that covers both bespoke applications and common automation analysis requirements.
Image Credit: Sensofar Metrology
Image Credit: Sensofar Metrology
Image Credit: Sensofar Metrology
Image Credit: Sensofar Metrology
Image Credit: Sensofar Metrology
Image Credit: Sensofar Metrology
Applications
The S lynx 2 is a multifunctional system that meets many needs in various contexts, including research and manufacturing. Find out some real-world instances:
Dimensional Measurements
Medical Devices Knee implant. Image Credit: Sensofar Metrology
Advanced Manufacturing Grinding Tool. Image Credit: Sensofar Metrology
Consumer Electronics MEMS. Image Credit: Sensofar Metrology
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System Specifications
Source: Sensofar Metrology
| . |
. |
| Measuring principle |
Confocal, CSI and Ai Focus Variation |
| Measurement types |
Image, 3D, 3D thickness |
| Camera |
1 Mpx: 1024x1024 px (150 fps) |
| Confocal frame rate |
60 fps |
| Range of magnifications |
2.5X - 100X |
| Field of view |
From 0.14 to 5.6 mm (single shot) |
| Z stage travel range |
20 mm; 5 nm resolution |
| Max. Z measuring range |
Confocal & Ai Focus Variation 12 mm; CSI 1 mm |
| XY stage range |
Motorized 125x75 mm |
| Max. Extended measurement area1 |
125 x 75 mm |
| Tip-tilt stage |
Manual up to ±4° of tilting |
| LED light sources |
Blue (460 nm); white (580 nm; center) |
| Nosepiece |
6 position fully motorized |
| Sample reflectivity |
0.05 % to 100% |
| Sample weight |
Up to 3 kg |
| Sample height2 |
Up to 100 mm |
| User management rights |
Administrator, supervisor, advanced operator, operator |
| Advanced Software Analysis |
Inc: SensoVIEW; Op: SensoPRO, SensoMAP |
| Computer requirements |
Intel Core i5/i7 processor, Ethernet connectivity, minimum 1920 x 1080 display resolution |
| Operating system |
Microsoft Windows 10 or higher |
| Dimensions |
330x450x540 mm |
| Weight3 |
34 kg |
| Power |
Line Voltage 100-240 V AC; frequency 50/60 Hz single phase |
| Environment |
Temperature 10 ºC to 35 ºC; Humidity <80 % RH; Altitude <2000 m |
Objective Lenses
Source: Sensofar Metrology
| |
Brightfield |
Interferometric |
| Magnification |
5X |
10X |
20X |
50X |
100X |
2.5X |
5X |
10X |
20X |
50X |
| NA |
0.15 |
0.30 |
0.45 |
0.80 |
0.90 |
0.075 |
0.13 |
0.30 |
0.40 |
0.55 |
| WD (mm) |
20 |
15.8 |
3.0 |
1.0 |
2.0 |
10.3 |
9.3 |
7.4 |
4.7 |
3.4 |
| FOV4 (μm) |
2820 x 2820 |
1410 x 1410 |
700 x 700 |
280 x 280 |
141 x 141 |
5650 x 5650 |
2820 x 2820 |
1410 x 1410 |
700 x 700 |
280 x 280 |
| Spatial sampling5 (μm) |
2.76 |
1.38 |
0.69 |
0.27 |
0.13 |
5.52 |
2.76 |
1.38 |
0.69 |
0.27 |
| Optical resolution6 (μm) |
1.11 |
0.55 |
0.37 |
0.21 |
0.15 |
2.32 |
1.34 |
0.58 |
0.44 |
0.32 |
| Measurement noise7 (nm) |
120 |
45 |
10 |
4 |
3 |
< 5 |
| Maximum slope8 (º) |
9 |
17 |
27 |
53 |
64 |
4 |
7 |
17 |
24 |
33 |
1 With the 2.5XTI objective.
2 Size for top positions of the regulable column and motorized Z stage.
3 Without objectives, or antivibration table.
4 Maximum field of view with 2/3” camera and 0.25X optics.
5 Pixel size on the surface.
6 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for blue LED in brightfield objectives and for white LED in interferometric objectives.
7 Measurement noise is measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment.
8 On smooth surfaces. Up to 86° on rough surfaces. Other objectives are available. 9 Values obtained in a VC-E vibration environment. Objective used for Confocal and Ai Focus Variation 50X 0.80 NA and for CSI 50X 0.55NA. Resolution 1024×1024 pixels. Extended uncertainty (U) according to ISO/IEC guide 98-3:2008 GUM:1995, K=1,96 (level of confidence 95%). σ according to 25 measures.
Accuracy and Repeatability
Source: Sensofar Metrology
| Standard |
Value |
Uncertainty (U) |
Repeatability (σ) |
Technology |
| Step height (H) |
<10 μm |
U= (0.005 + H/50) μm |
<10 nm |
Confocal, Ai FV and CSI |
| >10 μm |
U = (0.120 + H/120) μm |
>10 nm |
Confocal, Ai FV and CSI |
| Area roughness (Sa) |
0.79 μm |
40 nm |
6 nm |
Confocal, Ai FV and CSI |