With its comprehensive hardware and software package, the S neox Grand Format is intended for large panel 3D surface measurements in the semiconductor, display, and PCB sectors.
It offers limitless measurement potential, featuring an extensive 600x600mm travel range and a remarkable speed of one meter per second. The closed-loop XY gantry system ensures consistent performance, no matter the sample weight.
Image Credit: Sensofar Metrology
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Certified for Semiconductor Characterization
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- SEMI® S2 – SEMI® S8 –
- SEMI® F47– NFPA® 79
- Certified by TÜV Rheinland
Highest Measurement Versatility
With three distinct optical technologies available for each unique sample, the measuring sensor, the S neox Cleanroom, can image with the most accurate technology possible, attaining subnanometer precision.
Image Credit: Sensofar Metrology
Image Credit: Sensofar Metrology
Image Credit: Sensofar Metrology
Image Credit: Sensofar Metrology
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Cleanroom-Friendly
The measuring sensor is class 1 compliant.
The enclosure is composed of stainless steel to reduce particle emissions.
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Integrated Software Solutions
Built-In Acquisition Software
This sophisticated metrology instrument is entirely managed by the user-friendly SensoSCAN, which provides improved functionality for measurement automation.
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General Surface Analysis
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SensoPRO is a plugin-based software that effectively manages massive amounts of data while identifying certain traits. To satisfy the demands of analysis automation in the consumer electronics industry, they have offered a variety of bespoke plugins.
Rapid Quality Control
SensoPRO is a plugin-based program that effectively manages massive amounts of data while identifying particular features. To satisfy the demands of analysis automation in the consumer electronics industry, we have offered a variety of bespoke plugins.
Image Credit: Sensofar Metrology
The device has a large travel range of 600×600 mm and can reach speeds of up to one meter per second.
Image Credit: Sensofar Metrology
The closed-loop XY gantry design ensures consistent performance, regardless of the sample weight.
System Specifications
Source: Sensofar Metrology
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| Measuring principles |
Confocal, PSI, ePSI, CSI, Ai Focus Variation and Thin Film |
| Measurement types |
Image, 3D, 3D thickness, profiles and coordinates |
| Camera |
5 Mpx: 2448x2048 px (150 fps) |
| Range of magnifications B |
Brightfield: 2.5X - 150X | Interferometry: 2.5X - 100X |
| Field of view |
From 0.11 to 6.7 mm (single shot) |
| Vertical scan range |
Linear stage: 40 mm; Piezoelectric scanner: 200 µm (optional) |
| Measurement noise1 |
1 Down to 0.01 nm |
| Optical resolution2 |
Down to 148 nm |
| Accuracy3 |
<0.7% |
| Repeatability4 |
<0.02% |
| LED light sources |
Red (630 nm); green (530 nm); blue (460 nm); white (575 nm; center) |
| Nosepiece |
6-position fully motorized |
| Sample weight |
Up to 500 kg |
| Sample height |
t 28-68 mm (customizable) |
| User management rights |
Administrator, supervisor, advanced operator, operator |
| Advanced software analysis |
Inc: SensoVIEW; Op: SensoPRO, SensoMAP |
| Computer |
Latest INTEL processor; 3840x2160 pixels resolution (4K) (27”) |
| Operating system |
Microsoft Windows 10, 64-bit |
| Dimensions5 |
5 1600x1500x1500 mm |
| Power6 |
Option 1: 230 VAC phase to neutral. 50/60 Hz single-phase (1P+N+PE)
Option 2: 208 VAC phase to phase. 50/60 Hz three-phase (3P+N+PE) |
| Environment |
Temperature 10 ºC to 35 ºC; Humidity <80 % RH; Altitude <1000 m |
1 L&S: Line and Space. Values for blue LED and 150X 0.95NA.
2 Values for PSI and piezo.
3 Values performed with piezo and 50X magnification for a step height of 48600 µm.
4 Values performed with piezo and 50X magnification for a step height of 48600 µm.
5 Dimensions of the space occupied by the cabin.
6 Option 1 fulfills EN 60204-1:2018; Option 2, NFPA 79:2021.
Gantry XY Stage
Source: Sensofar Metrology
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| Positioning system |
Two axes gantry: XY translation of the head |
| Control type |
Linear close loop |
| Travel range |
600x600 mm |
| Accuracy |
3 µm |
| Repeatability |
0.21 µm |
| Travel speed |
Max. 1 m/s |
| Deceleration speed |
200 ms |
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Dimensions
mm (inch)
Image Credit: Sensofar Metrology
Sensofar has been a member of the International Organization for Standardization’s Technical Committee (ISO/TC213 WG16) since 2007.