Jun 24 2010
LOT are proud to be recently appointed as the UK/Ireland distributor for KLA Tencor Stylus and Optical Surface Profilers.
The range includes:-
2D & 3D Stylus Profilers:
Alpha Step D-100 & Alpha Step D-120 Stylus Profilers
Entry level Stylus Profilers offering long scans up to 55mm, 0.03mg force control, with options for 1.2mm Z range, Stress Measurement & Stitching Software
Applications include:
- Thin film stress
- Biological
- MEMS
- 3D imaging
- Material Characterization
P6+ P-16+ 3D Long Scan Advanced Stylus Profiler
High -End Stylus Profiler offering long scan (300mm), Wafer Stress Measurement & Pattern Recognition Mapping
Stylus Applications
- Semiconductor - CMP monitoring and bump metrology
- Material Science - Thin film thickness, roughness and stress analysis
- Data Storage - Thin film head structure definition and disk edge roll-off
- Optoelectronics - Microlens and diffuser shape
- MEMS - Etch rates and trench depth analysis
Optical Profilers:
The Micro XAM-100 Optical Profiler
Fast Snap-shot measurement time with 250 micron Z range & options for auto mapping & auto stitching of images
Applications include:
- Surface Texture
- Precision step height
- Surface form