Feb 16 2007
Axcelis Technologies, Inc. today reported it has won multiple orders for both its RapidCure FC film curing and RapidCure CE charge erase systems from a major Asian memory chipmaker. Axcelis' RapidCure family of advanced UV curing products provides enabling technology for a wide variety of established and emerging applications in sub-65nm device manufacturing. The RapidCure FC and CE systems will ship in the first quarter of 2007 and will be installed in multiple fabs in Asia.
"Our customer's multiple system order is powerful validation of Axcelis' proprietary UV curing technology and speaks volumes about its value for next-generation device development," said Mary Puma, chairman and CEO of Axcelis. "Axcelis has been at the forefront of UV curing technology for over two decades. Our RapidCure product line, with its application-specific, microwave-driven UV light source, incorporates winning technologies that deliver significant competitive advantages to our valued customers."
Axcelis' RapidCure FC film curing system is designed for enhancing and/or modifying mechanical and electrical properties of advanced semiconductor dielectric films. It is ideally suited for many of today's most sophisticated UV-based applications, including low- k and silicon nitride film curing, and charge neutralization.
Axcelis' RapidCure CE is the fastest and most flexible charge erase technology on the market for removing accumulated charge in devices. It cuts erase times up to a factor of 10X and delivers a more complete erase than many conventional UV erase products. This enhanced capability enables makers of flash and other non-volatile memory chips to significantly increase fab productivity and reduce operating costs.