Users require dependable contamination monitoring for their products and the ability to detect particles at an incredibly small scale. Now, they can have both — achieving sensitivity to 40 nm particles while benefiting from the highest level of reliability currently available in the market.
UltraChem® 40 is ideal if the application calls for measuring small particles in chemicals with high molecular scatter.
By using NanoVision Technology®, the light scattered by particles and fluid molecules no longer competes with one another, thus enabling accurate 40 nm sizing for the very first time.
Concerns about background noise and false counts are now a thing of the past, as the groundbreaking NanoVision Technology ensures that only data matching a particle’s unique fingerprint is counted. The outcome- Data that users can confidently rely on for their decision-making.
Benefits
Detect Small Particles
- Sensitivity at the 40 nm level.
- Increased sample volume to enhance data quality.
NanoVision Technology®
- Adaptive technology makes the instrument immune to most optical contamination.
- Visualize the particles detected by users’ particle counter.
- Capable of measuring small particles within a diverse range of chemicals, including fluids with high molecular scattering. These chemicals encompass:
- PGMEA
- Sulfuric acid
- HF
- Photoresist solvents
Low Cost of Operation
- Utilizes a solid-state laser diode.
- A 3-year warranty covers the Liquid Particle Counter, while a 1-year warranty backs the Electronic Flow Controller.
- Features a straightforward and uncomplicated design.
Versatile
- Supports numerous communication protocols.
- Offers both online and batch sampling options.
- The compact design enables flexible placement in various locations.
Applications
- Monitoring of deionized water (at both cold and hot temperatures).
- Ensuring chemical quality.
- Supervision of chemical distribution.
- Immersion lithography.
Specifications
Source: Particle Measuring Systems
| . |
. |
| Size range |
40 – 125 nm |
| Size channels |
40, 70, 100, 125 nm |
| Flow rate |
5 ml/min |
| Sample volume |
2 ml/min nominal |
| Maximum concentration |
2,500 particles/ml, Monitor and Spectrometer mode
15,000 particles /ml, High-Scatter mode |
| Sample temperature |
50 – 302 °F (10 – 150 °C) |
| Zero count |
< 20 counts/l |
| Laser source |
Laser diode
Class I, complies with US 21 CFR 1040.10 and EN 60825-1;
Internally an enclosed Class 4 laser is used per EN 60825-1 |
| Wetted surface materials |
Sapphire, Teflon®, Kel-F® |
| Dimensions (d, w, h) |
17.5 x 18.75 x 11.75 in (68.9 x 47.6 x 29.8 cm) |
| Weight |
35 lb (16 kg) |
| Power |
100 – 240 VAC 1.25 Amp |
| Communications |
Ethernet (PMS protocol)
4-20 mA
RS-232 (for set up only) |
| Calibration |
Materials used are traceable to National Institute of Standards and Technology (NIST) and/or Japanese Industrial Standards (JIS) |
| Environment |
Temperature: 50 – 95 °F (10 – 35 °C)
Humidity: Non-condensing
Indoor use only
Pollution degree 2
Over-voltages (transients) Category II
Ordinary protection (not protected against harmful ingress of moisture)
Class I equipment (Electrical earth ground from the mains power source to the product input is required for safety) |
| Warranty |
3-year |
| Electronic Flow Controller |
| Range |
2 – 20 ml/min |
| Accuracy |
± 10% |
| Control |
0 – 10 VDC (supplied by sensor) |
| Fluid temperature |
50 – 176 °F (10 – 80 °C) |
| Fluid pressure |
70 psi, maximum |
| Wetted materials |
PFA/PTFE |
| Communications |
RS-232 (maintenance functions only) |
| Operating principle |
Ultrasonic flowmeter with active PID needle valve control |
| Warranty |
1-year |