Cutting-edge microelectronic manufacturing demands exceptionally pure process chemicals that have a high degree of filtration and adhere to a target particle size of 20 nm or smaller.
We introduce the PMS Chem 20 Chemical Particle Counter, the most advanced particle sensor globally, boasting a remarkable sensitivity of 20 nm.
Rigorous testing and analysis of chemical distribution and packaging systems demonstrate that the PMS Chem 20 sensor, with its unprecedented 20 nm sensitivity, outperforms competitive products by detecting higher particle concentrations and delivering superior statistical data.
The Chem 20 Chemical Particle Counter is an invaluable tool, empowering facility and process engineers to swiftly identify and characterize potential chemical particle sources before they compromise process and device performance.
Benefits
- Real-time detection of 20 nm PSL and 9 nm Au particles.
- Identifying particles that can impede yield; a feat unmatched by rival technologies.
- Convenient online and offline 20 nm testing.
- Enhancing chemical delivery system efficiency from the loading dock to the point-of-process.
- Swift response to particle deviations well before surface scans or yield data become accessible.
- Enhancing process control precision by refining sample population statistics.
Features
- Equipped with an on-board chemical flow meter for convenient sample flow adjustment.
- Employing advanced laser optics and detectors to achieve the detection of 20 nm polymer particles and 9 nm metallic particles in chemical solutions.
- The first particle counter specially designed to excel in both low and high refractive index chemical environments, enhancing overall performance:
- Utilizing the Chem 20 sensor for chemicals with lower refractive indices.
- Featuring the Chem 20-HI sensor, optimized for higher-index chemicals such as sulfuric acid.
- Built-in leak detection capability, issuing alarms in the event of an internal chemical leakage.
- Incorporates a low-flow detector and alarm system to maintain consistent data collection.
- Utilizes syringe sampling with the SLS-20 syringe liquid sampler.
- Includes a bubble detector to enhance data quality and safeguard the sensor.
- Features a local data display for easy monitoring.
- Offers two view modes for optimal instrument operation, catering to both highly contaminated and extremely clean applications, expanding the product’s versatility.
- Boasts flexible communication systems that accommodate legacy data acquisition systems.
Applications
- Real-time particle monitoring in chemical distribution systems.
- Oversight of chemical packaging operations.
- Monitoring at the point-of-process.
- Quality assurance and verification of chemical properties.
- Assessment of chemical filter performance and efficiency.
- Evaluation of the performance of chemical handling components.
Specifications
Source: Particle Measuring Systems
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| Size range |
≥ 20 nm PSL and 9 nm Au minimum detection limit |
| Channels |
4 |
| Channel sizes |
20, 50, 70, 100 nm (standard)
20, 30, 50, 70 nm (optional) |
| Flow rate (ml/min) |
35 ml/min |
| Zero count |
< 100 counts per liter |
Maximum
concentration 1 |
High Resolution Mode
2500 P/ml ≥ 20 nm; 1000 P/ml ≥ 100 nm |
High Concentration Mode
500,000 P/ml > 20 nm; 10,000 P/ml > 100 nm |
| Sample temperature |
59 – 104 °F (15 – 40 °C) |
| Maximum pressure |
75 psi, max |
| Wetted surface materials |
PFA, PTFE, Sapphire, Kel-F®, Kalrez® 4079 |
| Exterior surface |
316L stainless steel enclosure |
External Dimensions
(l, w, h) |
20.0 x 16.8 x 11.1 in (50.8 x 42.7 x 28.3 cm) |
| Weight |
64.5 lb (29.2 kg) |
| Power |
100 – 240 VAC |
| Laser classification |
Class I complies with US21 CFR 1040.10 and EN60825-1.
Internally an enclosed Class IV laser is used per EN60825-1. |
| Communications |
Ethernet (PMS protocol), 4-20 mA (5 outputs: 4 size channels, 1 sensor status), RS-232 (set up and diagnostics only) |
| Status indicator |
LCD display and one (1) tri-color LED. Indicates operation and communication status, and laser, sample flow or internal-leak status |
| Calibration |
Sensors calibrated using PSL particles in pure water. Materials used are traceable to National Institute of Standards & Technology (NIST) and/or Japanese Industrial Standards (JIS). |
| Environment |
Temperature: 64 – 82 °F (18 – 28 °C) ± 1 °C/hr
Humidity: 5 - 90%, Non-Condensing
Sensor must be installed in a conditioned environment with stable temperature control.
Indoor use only; Pollution degree 2
Isolated from excessive machinery or vehicle vibration
Over-voltage (transients) Category II
Ordinary protection (not protected against harmful ingress of moisture)
Class I environment (Electrical earth ground from the mains power source to the product input is required for safety purposes) |
1 Less than 10% coincidence loss, measured at the maximum recommended concentration.