Jul 26 2008
Oxford Instruments Plasma Technology (OIPT), part of Oxford Instruments plc, a leading provider of high technology tools and systems, has released the new Ion Beam etch and deposition systems brochure which outlines the family of Ion Beam Technology tool offerings suitable for both R&D and batch production capabilities.
These tool configurations enable flexible performance with capabilities suitable to perform etch and/or deposition whilst also maximising system utilisation.The Ion Beam range family consists of three products; The Ionfab300Plus- suitable for etch and deposition processes in one tool, Optofab3000 – a purpose made system for optical coatings and the Ionfab500Plus -a specialist high precision ion beam deposition system. Each system boasts unique system specifications
For more information on deposition systems, click here.