Nordson ASYMTEK has launched its automated workcell, a combination of MH-910W same-side loader/unloader and Spectrum S-920N dispenser, for applications in film-frame wafer-level packaging at SEMICON West.
Automated Work Cell comprising MH-910W same-side loader/unloader and Spectrum S-920N dispenser
The new workcell is developed for processing 150 mm film-frame wafer but can also handle different sizes. It can be used in jet dispensing of biochip reagent, wafer coating for imaging equipment like digital light processing, image sensor/MEMS capping, jetting of thin layer of coatings before laser dicing to minimize dust produced by ablation fall-out during the dicing process.
The workcell is compact, measures 1225x1321 mm and complies with CE, SMEMA, SEMI-S8 and SEMI-S2 certifications and standards. Its S-920N dispensing system and MH-910W film-frame loader/unloader are completely covered with interlocked windows and doors to ensure component and operator protection. Its access panels can be separated easily and its integrated software maintenance tools allow trouble-free servicing.
The workcell features active pinch wheels and numerous sensors to assure safe handling, while the MH-910W same-side loader/unloader offers programmable transport speed to optimize units per hour. Film-frame wafers are dragged from one cassette and then entered into a second cassette subsequent to the dispensing process. A frame sensor locates the next wafer and helps in decreasing search time for partly filled cassettes.
During loading, active pinch wheels and a soft-touch gripper drag the film-frame wafers from the cassette and pass them into the system. Prior to returning processed wafers into the second cassette, sensors confirm that the cassette slots are empty.