May 20 2005
A new, 5-segment semiconductor backscattered electron detector with high sensitivity and fast response rates has been introduced for the S-3400N variable pressure SEM from Hitachi High-Technologies. The detector can be used for both variable pressure and high vacuum imaging.
This new detector gives exceptional sensitivity, especially at low accelerating voltages. The high sensitivity allows smaller spot sizes and beam currents to be used in BSD imaging leading to improved resolution and lower risk of beam damage on delicate, uncoated specimens. The detector also works at TV scan rates, making it easier to find the required field of view.
The detector features five, independently selectable segments, instead of the four found on conventional multi-segment detectors. Selection of the appropriate combinations of segments allows this versatile detector to be switched between a number of different imaging modes. This not only gives the traditional topographic and atomic number contrast imaging modes associated with backscattered electron imaging, but the 5th segment allows the detector to produce 3-D images as well.
The S-3400N is the latest addition to the Hitachi range of variable pressure scanning electron microscopes. To the versatility of variable pressure imaging is added an extremely large specimen chamber. This not only accommodates samples of up to 80 mm thickness at the analysis position, but also allows the simultaneous mounting of an energy dispersive X-ray (EDX) and wavelength dispersive X-ray (WDX) spectrometers for comprehensive elemental analysis. The S-3400N also features a unique automatic beam alignment system, designed to give perfect focus whatever the operating conditions.
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