Jul 3 2014
Spintrac Systems, Inc., a Silicon Valley based manufacturer of photoresist spin coater and developer systems, today announced the release of its Tractrix-450 Coat-Bake system. This system is designed to support the growing R&D market for processing 450mm semiconductor wafers.
Industry veterans Alan Kukas of Spintrac Systems (left) and Leon Pearce of Noel Technologies convene as Spintrac's 450mm coat/bake system is delivered.
According to Alan Kukas, president of Spintrac Systems, the first system has been shipped and installed at Noel Technologies in Campbell, CA. Due to Noel's expanding customer demand, the system delivered to Noel can also accommodate coating, baking and chilling 300mm wafers with a proprietary indexer that accommodates a 300mm FOUP cassette.
The Tractrix -450 tool comes equipped with:
- A custom 450mm loading platform for single wafer processing
- Automated transfer of the wafer through predefined process flows
- Windows OS user interface for login and creating process programs.
Much of the technology has been adapted from the production-proven Tractrix system released over a decade ago.
According to Leon Pearce, President of Noel Technologies, they will now be able to add coated 450mm wafers to the process services they offer. The specialty foundry first offered process development for 450mm wafers in wet processes, etches, and wafer cleaning beginning in 2013.
About Spintrac Systems
Spintrac Systems Inc. produces track systems for coating, baking, and developing that are used in R&D labs and production fabs. The company's processing systems were initially targeted towards silicon wafers but now extend into many specialized substrates including compound semiconductors (InP, GaAs), sapphire, glass and ceramic varying in size from 2" to 320mm x 380mm plates to 450mm. All of the company's products are designed with a focus on delivering precise, repeatable process results while maintaining a high level of reliability and serviceability.