Surfx's patented low temperature, particle free, atmospheric pressure argon plasma is now available for integration directly into your bonding and coating machine! The INT series Atomflo™ plasma system is designed to interface with new or existing process equipment. It can be connected via Ethernet IP for comprehensive process control and data logging. The INT delivers the most advanced surface treatment technology directly within your equipment.
Choose from plasma head sizes ranging from a small 2-mm spot to a 100-mm-wide linear beam.
The INT series plasma system can be incorporated both in-line and as a batch tool. Features include:
- Easily pass industry compliance with INT series modules
- Real-time monitoring and control of process conditions
- Standard 19 inch server rack modules for easy integration
Surfx argon plasma source on six-axis robot. Image Credit: Surfx Technologies, LLC
Surfx argon plasma source on SCARA robot. Image Credit: Surfx Technologies, LLC
Surfx argon plasma source in a work cell. Image Credit: Surfx Technologies, LLC
The INT series Atomflo™ plasma system is specifically designed to integrate automated surface treatment into a customer’s process equipment or manufacturing line.
Gas Tray Facilities. Source: Surfx Technologies, LLC
| Plasma gases* (choose one) |
| Type |
Inlet Fitting** |
Regulator |
Max Flow (LPM) |
Operating Pressure |
| Argon (Ar) |
3/8-inch OD |
CGA 580 |
40 |
0.35-0.7 MPa (50-100 psig) |
| Helium (He) |
3/8-inch OD |
CGA 580 |
60 |
0.35-0.7 MPa (50-100 psig) |
| Process gases* (choose two) |
| Type |
Inlet Fitting** |
Regulator |
Max Flow (LPM) |
Supply Gas Pressure |
| Oxygen (O2) |
1/4-inch OD |
CGA 540 |
0.60 |
0.35-0.7 MPa (50-100 psig) |
| Nitrogen (N2) |
1/4-inch OD |
CGA 580 |
0.60 |
0.35-0.7 MPa (50-100 psig) |
| 5.0 % H2 in argon |
1/4-inch OD |
CGA 580 |
10.0 |
0.35-0.7 MPa (50-100 psig) |
*Gas purity should be at least 99.99 % (industrial grade).
**Swagelok bulkhead connector.
Controller Facilities. Source: Surfx Technologies, LLC
| Specifications |
| Power supply |
200 – 240 VAC, 8 A, 50/60 Hz |
| Air supply (CDA) |
None |
| Dimensions (W*D*H) |
19 inch server rack compatible Added dimensions see module detail sheet |
| Weight |
23 kg (51 lbs) |
Coolant Control Module Facilities. Source: Surfx Technologies, LLC
| Specifications |
| Coolant |
Distilled or deionized water (1.0 Liter) |
| Power supply |
200 – 240 VAC, 4.1 A, 50/60 Hz |
| Air supply (CDA) |
None |
| Dimensions (W*D*H) |
19 inch server rack compatible Added dimensions see module detail sheet |
| Weight (dry) |
9 kg (20 lbs) |