The Coolant Control Module is a closed-loop water circulation system that regulates plasma source temperature throughout plasma cleaning and actively cools the plasma source to enhance plasma stability and protect substrates from thermal damage.
AFC-CCM features include:
- Temperature monitoring and control in real-time
- Ethernet output of set point and process temperature (through the AtomfloTM controller)
- Integration with the AtomfloTM controller for automated temperature regulation
- Cooling and heating capabilities
Facilities and Dimensions
Source: Surfx Technologies, LLC
| Specifications |
| Power supply |
200 – 240 VAC, 8 A, 50/60 Hz |
| Coolant |
Distilled water (~1.0 L) |
| Typical operating temperature |
60 °C |
| Dimensions (W*D*H) |
437 x 650 x 143 mm (17.2 x 25.6 x 5.6 inches) |
| Weight |
11.3 kg (28 lbs) |
Image Credit: Surfx Technologies, LLC