The AtomfloTM 600 controller serves as the central unit of the argon plasma system. It features a 600 W radio frequency (RF) power supply, an auto-tuning matching network, three mass flow controllers to regulate argon, and two process gases, including hydrogen, oxygen, or nitrogen.
The controller also includes a computer running Windows 10 and operated through an eight-inch touch screen. LabVIEW software offers users a robust interface for selecting recipes, adjusting control modes, and monitoring process conditions.
The controller's features include:
- Unlimited capacity for storing process recipes
- Real-time management of argon and process gas flow rates, plasma source temperature, and RF power
- Auto-tuning of forward and reflected power through phase and magnitude detection
- Warnings and alarms for processes outside specifications
- Real-time graph display of process parameters
- Remote control and data logging capabilities via Ethernet
Image Credit: Surfx Technologies, LLC
AF-600 Specifications
Dimensions (W × D × H)
- 440 × 640 × 230 mm
- 17.3 × 25.1 × 9.1 inches
RF Power
- Maximum 600 W
- At 27.12 MHz
Patented Plasma Technology
- O2, H2, N2 reactive gas chemistry
- Atmospheric argon plasma
- RF capacitive discharge
AFC-600
The AtomfloTM 600 controller is engineered to give customers comprehensive process traceability and full control over atmospheric pressure plasma.
Gas Facilities
Source: Surfx Technologies, LLC
| Plasma gases* (choose one) |
| Type |
Inlet Fitting** |
Regulator |
Max Flow (LPM) |
Operating Pressure |
| Argon (Ar) |
3/8-inch OD |
CGA 580 |
40 |
0.35-0.7 MPa (50-100 psig) |
| Helium (He) |
3/8-inch OD |
CGA 580 |
60 |
0.35-0.7 MPa (50-100 psig) |
| Process gases* (choose two) |
| Type |
Inlet Fitting** |
Regulator |
Max Flow (LPM) |
Supply Gas Pressure |
| Oxygen (O2) |
1/4-inch OD |
CGA 540 |
0.60 |
0.35-0.7 MPa (50-100 psig) |
| Nitrogen (N2) |
1/4-inch OD |
CGA 580 |
0.60 |
0.35-0.7 MPa (50-100 psig) |
| 5.0 % H2 in argon |
1/4-inch OD |
CGA 580 |
10.0 |
0.35-0.7 MPa (50-100 psig) |
*Gas purity should be at least 99.99 % (industrial grade).
**Swagelok bulkhead connector.
Facilities
Source: Surfx Technologies, LLC
| Specifications |
| Power supply |
200 – 240 VAC, 8 A, 50/60 Hz |
| Air supply (CDA) |
None |
| Dimensions (W*D*H) |
437 x 650 x 232 mm (17.2 x 25.6 x 9.1 inches) |
| Weight |
29 kg (64 lbs) |
Image Credit: Surfx Technologies, LLC