Posted in | Materials Processing

Atomic Scale Processing Solutions

Atomic Scale Processing Solutions from Oxford Instruments Plasma Technology. Clustering multiple processing modules into one system enables unique solutions on a single vacuum transfer. Here is one example of such a tool that is clustered using CVD, ALD and ALE modules.

Learn more at https://plasma.oxinst.com

Run Time - 3:49

Atomic Scale Processing Solutions - Oxford Instruments Plasma Technology

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