Aug 14 2007
Applied Materials, Inc. today announced that it has shipped 100 Applied Producer® GT systems to leading logic and memory manufacturers worldwide since its launch nine months ago. Considered the industry’s most productive CVD1 platform, the Producer GT has quickly found worldwide acceptance. The Producer GT has nearly twice the throughput density of any competing system and supports a comprehensive range of proven advanced chipmaking applications.
“The Producer GT has truly become a ‘dream machine’ for our customers, creating high demand from both logic and memory chipmakers,” said Dr. Hichem M’Saad, vice president and general manager of Applied Materials’ Dielectric Systems and CMP Business Group. “As the pressure on fab utilization intensifies, manufacturers must maximize the output of their existing production facilities. In the same floor area, Producer GT systems can process 75% more wafers than the previous best-of-breed Producer system and 100% more than competing systems.”
Key to the Producer GT’s benchmark performance is a compact design that maximizes the productivity of its three Twin Chamber® architecture. The four wafer FX robot and double-decker loadlocks deliver lightning-fast wafer handling with excellent particle performance. The Producer GT's architecture also offers remarkable application flexibility, allowing multiple process steps to be combined in a single continuous sequence. Material properties can be modulated within a film to provide the sophisticated atomic interface engineering capability that is vital for the integration of new materials in cutting-edge devices. In addition, innovative in-situ chamber clean technology extends preventive maintenance intervals to an unprecedented 150,000 wafers, dramatically improving customers’ factory output.