STA 10iL for Electronics and Semiconductor Manufacturing

The STA-10iL automated plasma system is designed to clean and activate substrates for improved adhesion. It is ideal for semiconductor packaging and electronics manufacturing. The STA-10iL comes standard with in-line conveyance for high-volume manufacturing. An optional drawer can be installed for high-mix, low-volume production. Other options include pins lift the wafer, heating/cooling plates, vacuum chucks, and more.

Inside the STA-10iL, a three-axis gantry selectively applies the most advanced atmospheric plasma to your substrates. Surfx’s Atomflo^™ controller operates with low voltage, radio frequency (RF) power, and generates a uniform, particle free, and electrically neutral plasma that is safe on the most sensitive electronics.

The STA-10iL has many options for in-line or batch manufacturing with full traceability:

• Oxygen plasma for organic clean
• Hydrogen plasma for metal oxide removal
• Cleanroom class 100 (1,000 is standard)
• Inert gas purge for reducing gas chemistry
• Substrate Heating and cooling

Run Time: 2:22 mins

Video Credit: Surfx Technologies, LLC