Posted in | Materials Testing and Characterisation | MRS 2011 Fall Meeting

The DCM-3D Surface Metrology Tool form Leica

Bill Henderson from Leica shows us the DCM 3D surface metrology tool. The system features a confocal microscope and interferometer and features LED illumination and CCD detector. The resolution of interferometer and confocal microscope are 0.1nm and 3.5nm respectively.

The DCM 3D can perform surface metrology measurements on various substrates and can resolve features from the sub micron range up to the millimeter range. It can generate full 3-dimensional surface maps and measure such things as topographical roughness and step heights.

The DCM 3D is fast an accurate and suited to a wide range of applications such as life sciences, semiconductors and solar.

Run time - 3:18 min

DCM 3D Surface Metrology Tool from Leica

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