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FusionScope is an innovative correlative microscopy platform that integrates AFM measurement techniques, SEM imaging, and EDS elemental analysis.

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The FusionScope

Correlative AFM & SEM

  • 3.5–15 kV Acc. voltage
  • Schottky emitter

AFM

  • Piezoresistive cantilever
  • Scan range: 222 µm (XY)
  • Scan range: 11 µm (Z)

Compact Vacuum Chamber:

Pumping time: Less than 5 minutes

Joint Coordinate System

FusionScope - Integrated AFM, SEM, and EDS

Image Credit: Quantum Design International

Main Benefits of Correlative AFM and SEM Microscopy:

  • FusionScope is a user-friendly platform that combines the advantages of SEM and AFM.
  • Accurately position the AFM on your area of interest, even on complex or difficult surfaces.
  • Conduct a comprehensive analysis of topography, nanomechanics, chemistry, electrical, and magnetic properties using correlative SEM and AFM techniques.

FusionScope - Integrated AFM, SEM, and EDS

Image Credit: Quantum Design International

Self-Sensing Cantilever

The electrical noise level of 0.32 Å for the self-sensing cantilever is equivalent to the optical noise level.

FusionScope - Integrated AFM, SEM, and EDS

Image Credit: Quantum Design International

FusionScope - Integrated AFM, SEM, and EDS

Image Credit: M. Dukic et al., Scientific Reports 5, 16393 (2015)

EFM Analysis of BaTiO3 Ceramics

Investigate grain boundary interfaces and energy barriers as a function of silica content.

FusionScope - Integrated AFM, SEM, and EDS

Image Credit: Quantum Design International

Silicon-rich phase shows a smaller energy barrier.

FusionScope - Integrated AFM, SEM, and EDS

Image Credit: Prohinig et al., Scripta Materialia 214 (2022) 114646 

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Magnetic Properties of Duplex Steel

Utilize SEM to identify and map different magnetic domains on the surface of Duplex Steel.

 FusionScope - Integrated AFM, SEM, and EDS

Image Credit: Quantum Design International

Integrate SEM, EBSD, AFM topography, and MFM data for comprehensive correlative analysis.

 FusionScope - Integrated AFM, SEM, and EDS

Image Credit: Quantum Design International

Summary

FusionScope

An innovative method for interactive correlative research at the nanoscale that combines AFM and SEM.

FusionScope - Integrated AFM, SEM, and EDS

Image Credit: Quantum Design International

Analyze Electrical Properties

Conduct in-situ EFM characterization at the BaTiO3 grain boundaries.

FusionScope - Integrated AFM, SEM, and EDS

Image Credit: Quantum Design International

Analyze Magnetic Properties

Conduct MFM characterization of duplex steel in situ.

FusionScope - Integrated AFM, SEM, and EDS

Image Credit: Quantum Design International

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Other Equipment by this Supplier

Simultaneous AFM and SEM with AFSEM®

Simultaneous AFM and SEM with AFSEM®

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