Posted in | Materials Testing and Characterisation

RPMBlue-FS PL Mapping System from Nanometrics for Compound Semiconductor Users

This video shows the functioning of Nanometrics’ RPMBlue-FS, photoluminescence (PL) mapping tool that can be fixed with a robotic wafer handler when required. This PL mapping system has a research-grade 300mm focal length monochromator that can cover wavelengths ranging from 200nm to 2.6μ. It can even handle wafer sizes spanning from 2 to 6".

The high-speed room temperature PL mapper can meet the requirements of compound semiconductor users. It has the ability to control up to 8 MOCVD reactors with a throughput of nearly 35 wafers per hour on foreign samples and 80 wafers per hour on 2” LED wafers.

Run Time – 2:25min

The RPMBlue-FS photoluminescence mapping tool from Nanometrics

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