The SmartSE is a phase modulated Spectroscopic Ellipsometer from HORIBA. It uses Liquid Crystal Technology to modulate and analyze the polarization of the incident and reflected light beams. Ellipsometry heads are mounted on a goniometer with manual variable angle of incidence and a CCD camera is used for signal acquisition allowing fast measurements.
The SmartSE provides wavelength coverage from 450 to 1000 nm with spectral resolution of 3 nm. It also features 7 computer controlled microspots and the unique Vision system for improved visualization of the spot on samples, even absorbing one. The various fields of application include Semiconductors, Flat panel display, Photovoltaic devices, Functional coatings, and Biochemistry.
Specifications
Specifications of the Smart SE Spectroscopic Ellipsometer are provided in the table below:
| |
|
|
| Wavelength Range |
450 to 1000 nm |
|
| Light Source |
Combined Halogen and Blue LED |
|
| Measuring Time |
1 sec to 10 sec |
|
| Accuracy |
Air Measurement: Y=45°±0.05°; D=0°±0.2° |
|
| Angle of Incidence |
45°-90° by step of 5° |
|