Posted in | EDS

Understanding and Reducing Errors in Strain Measurements with HR-EBSD

Modern diffraction-based tools, from micro-focus X-ray diffraction (XRD) to electron microscopy-based techniques, enable multi-scale residual strain quantification. This study confirms that methods sensitive to interplanar angle changes (Δθ/θ), like HR-EBSD and TKD, report higher strain values than those sensitive to interplanar spacing changes (Δd/d), such as micro-Laue XRD and PED. A consistent scaling factor is observed between these methods as strain increases.

Using simulated patterns, the study reveals that HR-EBSD underestimates Δd/d-based strain compared to Δθ/θ-based strain by a factor similar to the discrepancy between XRD- and EBSD-based measurements. Comparisons of TKD and PED strains at identical locations show numerical consistency despite differing resolutions, highlighting the significance of this scaling factor.

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