The High Sensitivity Liquid in Situ (HSLIS) e-Series particle counter offers consistent, real-time monitoring of contamination levels in process chemicals and DI water. It is perfect for situations requiring a large number of sensors and long-term trends because of its low cost and high sensitivity.
The sizing sensitivity of the HSLIS e-Series is 0.05 µm in DI water and 0.065 µm in process chemicals.
Integration of the HSLIS e-Series into Particle Measuring Systems’ Facility Net software provides a way to monitor various flow systems at a cheap cost and offers dedicated local display and control capabilities.
Benefits
- Monitor for long-term trends in fluid quality
- Control and monitoring of several particle counters via Ethernet
- Low initial capital investment and lower maintenance costs with the proven reliability of the HSLIS design
- Tabular and statistical process control (SPC) charts provide detailed statistical information
- Alphanumeric paging and e-mailing tools to notify the operator of data deviations
- Sensor status shows a four-level alert for monitoring out-of-spec conditions
- Simplified data interpretation using real-time and retrieved time charts
Features
- Size range of 0.05, 0.1, 0.15, and 0.2 µm
- Four channels
- Operates with an optimal flow rate of 100 ml/min ±10 %
- Samples 0.25 % of the flow volume or 0.25 ml/min
- Facility Net software compatible
- An existing network can be used with ethernet connectivity to Facility Net software
Applications
- Particle tracking in real-time with chemical distribution systems
- Chemical packaging operations management
- Efficiency characterization and chemical filter performance
- Performance testing of chemical handling components’
- Point-of-process monitoring
Specifications
Source: Particle Measuring Systems
| |
M50e |
M65e |
M100e |
| Size range |
0.05 – 0.2 μm |
0.065 – 0.2 μm |
0.1 – 1.0 μm |
| Channels |
4 |
| Channel sizes |
0.05, 0.1, 0.15, 0.2 μm |
0.065, 0.1, 0.15, 0.2 μm |
0.1, 0.2, 0.5, 1.0 μm |
| Flow rate |
100 ml/min ± 10 % |
100 ml/min ± 10 % |
300 ml/min ± 10 % |
| Sample volume |
0.25 ml/min |
0.6 ml/min |
3.0 ml/min |
| Counting efficiency |
100 % of sample volume |
| Maximum concentration |
10,000 counts/ml |
Sample
temperature |
194 °F (90 °C) |
212 °F (100 °C) |
212 °F (100 °C) |
| Zero count |
< 1000 counts/liter |
< 2000 counts/liter |
< 1000 counts/liter |
| Wetted surface materials |
Delrin®, Kel-F®, Teflon®, Viton®, fused silica |
Kalrez 4079, Kel-F, Teflon, sapphire |
Kalrez 4079, Kel-F, Teflon, sapphire |
Dimensions
(L x W x H) |
21 x 10.75 x 7 in (53 x 27 x 18 cm) |
| Weight |
28 lb (13 kg) |
| Power |
85 – 250 VAC, 50 – 60 Hz |
| Calibration |
Materials used are traceable to US National Institute of Standards and Technology (NIST) and/or Japanese Institute of Standards (JIS). |
| Environment |
Temperature: 50 – 95 °F (10 – 35 °C); Humidity: non-condensing |
| Communications |
Ethernet, 4-20 mA (5 outputs; 4 particle channels, 1 instrument status)
RS-232 (set-up and diagnostics, no data) |
*Greater than 90 % accuracy (less than 10 % coincidence loss) at maximum recommended concentration.