The Verios 5 XHR SEM provides subnanometer resolution over the full 1 keV to 30 keV energy range with unmatched materials contrast. Unrivaled levels of automation and ease of use make this performance accessible to all users, regardless of their level of experience.
Scanning Electron Microscopy Characterization
- Consistent measurement results with ConstantPower lenses, electrostatic scanning and a choice of two piezoelectric stages.
- It can accommodate for accessories with a large chamber.
- Greatly reduced time to nanoscale information for users with any experience level using the Elstar electron column featuring SmartAlign and FLASH technologies.
- High-resolution nanomaterial imaging with the UC+ monochromated electron source for sub-nanometer performance from 1-30 kV.
- High contrast on sensitive materials with excellent performance down to 20 eV landing energy and high-sensitivity in-column and below-the-lens detectors and signal filtering for low-dose operation and optimal contrast selection.
- Unattended SEM operation with Thermo Scientific AutoScript 4 Software, an optional Python-based application programming interface.
Verios 5 XHR Scanning Electron Microscope Features
SmartAlign Technology
By removing the need for any user alignments of the electron column, SmartAlign technology reduces maintenance and boosts productivity.
Sub-Nanometer Resolution
The sub-nanometer resolution of Elstar Schottky monochromated (UC+) FESEM ranges from 1 to 30 keV.
Low Dose Operation and Optimal Contrast Selection
Advanced suite of high-sensitivity, in-column and below-the-lens detectors and signal filtering for low-dose operation and optimal contrast selection.
Unattended SEM Operation
An optional Python-based application programming interface is available with AutoScript 4 Software (API).
Innovative Electron Optics
Features Thermo Scientific’s patented UC+ gun (monochromator), ConstantPower lenses, and electrostatic scanning for accurate and stable imaging.
Consistent Measurement Results
With its ability to calibrate to a NIST-certified standard at high magnification, the Verios is ideal for lab-based metrology applications.
Easy Access to Beam Landing Energies
As low as 20 eV with very high resolution for true surface characterization.
Large Chamber
With two accurate and reliable piezo-driven stages to choose from.
Specifications
Source: Thermo Fisher Scientific – Electron Microscopy Solutions
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Electron beam resolution
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- 0.6 nm at 30 kV STEM (optional)
- 0.6 nm at 2-15 kV
- 0.7 nm at 1 kV
- 1.0 nm at 500 V
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| Standard detectors |
ETD, TLD, MD, ICD, beam current measurement, Nav-Cam+, IR-camera |
| Optional detectors |
Optional detectors | EDS, EBSD, RGB cathodoluminescence, Raman, WDS, and more |
| Stage bias (beam deceleration, optional) |
Up to -4000 V, included as standard |
| Sample cleaning |
Integrated plasma cleaner, included as standard |
| Sample manipulation |
Verios 5 UC
- 5-axis motorized eucentric stage, with XYR axes piezo driven.
- XY range 150 x 150 mm2, 70° tilt range.
- Loading through the door.
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Verios 5 HP
- Chamber mounted, ultra-stable 5 axis all piezo motorized stage.
- XY range 100 x 100 mm2, 70° tilt range.
- Loading via automated load lock.
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| Chamber |
379 mm inside width, 21 ports |
| Software options |
- Thermo Scientific Maps Software for automatic large-area acquisition using tiling and stitching; correlative work
- AutoScript 4 Software, a Python-based application programming interface (API)
- Pattern generation software
- TopoMaps Software for image colorization, image analysis and 3D surface reconstruction
- Cell Navigator for bit cell navigation
- Web-enabled data archive software
- Remote control software
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