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3D Roughness analysis with Desktop SEM

Thermo Scientific 3D Roughness Reconstruction (3DRR) is an application designed for analyzing surface roughness. By incorporating shape from shading with BSD imaging, 3DRR allows users to generate three-dimensional images and perform submicron measurements. It can be hard to identify surface details such as dents, scratches, and burrs by looking at flat, 2D images. In comparison, 3D images are easy to interpret.

In addition, measuring the average roughness (Ra) and roughness height (Rz)  enables users  to optimize surface treatment processes. 

Key Features

No stage tilt required

Thanks to “shape from shading” technology, there is no need for stage tilt.

Roughness measurements

Measure surface properties such as average roughness and roughness height.

3D Imaging

Construct 3D images from a sample surface, making it easier for user to interpret sample characteristics.

Specifications

 

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Image creation

  • 2D or 3D with colored height indication
  • Filtered 3D for surface roughness
  • Based on “shape from shading” technology, no stage tilt required

Automated roughness measurements

  • Ra (average roughness) and Rz (roughness height)
  • User defined waviness filtering
  • Up to 10 line measurements

Field of view

  • 1 mm - 10 μm

Resolution

  • 1024 x 1024 pixels

Output

  • Line profiles, CSV files, 2D/3D view images and Word report

Other Equipment by this Supplier

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