TEM and STEM sample preparation software for automated, high-productivity creation of high-quality TEM samples.
For DualBeam (focused ion beam scanning electron microscopy, or FIB-SEM) systems, Thermo Scientific AutoTEM 5 Software is a special solution that enables fully automated, in situ transmission electron microscopy (TEM) sample preparation for various materials science samples. Regardless of user experience level, it delivers quick, dependable, and repeatable results.
Key Features
High Quality
Users of any experience level can prepare high-quality S/TEM samples in less than an hour.
Robust Results
Reliable, consistent outcomes for a variety of material science samples
Complete Workflow
Full in situ S/TEM sample preparation workflow comprising user-guided lift-out, automated final thinning, and automated chunking.
High Throughput
High throughput with auto cross-section and fully automated, unattended multi-site lift out, and ex-situ capabilities.
Automated In-Situ Sample Preparation
In situ sample preparation is fully automated and employs three distinct geometries: inverted, plan view, and top-down.
Highly Configurable Workflow
A highly customizable workflow that makes it possible to prepare difficult samples.
Specifications
Source: Thermo Fisher Scientific – Electron Microscopy Solutions
| |
|
Manual preparation |
AutoTEM 5 Software |
| Materials |
Metals and alloys
(diff. mill rates, roughness) |
|
|
| Semiconductors |
|
|
Polymers and ceramics
(charging, beam sensitive) |
|
|
| Process coverage |
Chunk milling |
Manual |
Fully automated or interactive |
| Lift-out process |
Manual |
| Final thinning |
Manual |
| Low-energy polishing |
Manual |
| Specifications |
Throughput |
60 – 120 mins |
< 45 mins |
| High quality |
User dependent |
Protocol dependent |
| Repeatability |
- |
|
| Overnight runs |
- |
|
| User |
Experience level |
Expert |
Beginner |